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Organisation – Nano-Rennes
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Organisation

The equipment of the Nano-Rennes platform is gathered in clean rooms and in gray rooms.

 

►Clean rooms

The total surface of the clean rooms is around 350 m². Their class is 1000 (ISO6) or 100 (ISO5) for sensitive areas. There are 3 of them:

  • A clean room (130 m²) dedicated to III-V nanophotonic technologies (hosted on the FOTON-OHM site)
  • A clean room (120 m²) dedicated to microelectronic technologies Si (hosted on the DMM IETR website)
  • A platform (80 m²) dedicated to organic technologies (hosted on the DMM IETR website)

 

Plan of the clean room III-V
Plan of the clean room III-V

 

Plan of the clean room of the IETR
Plan of the clean room of the IETR

 

►Grey rooms

The total surface of the gray rooms exceeds 500m². They are dedicated to:

  • Growth of materials (1 GS-MBE III-V, 1 SS-MBE III-V coupled to a UHV-LPCVD Si frame), for thin-layer deposition with IETR 4 LPCVD Si, 4 PECVD μSi and 2 Sputt RF
  • Structural characterization (2 AFMs, 1 DDX)
  • Electrical characterizations (Hall, measuring station under spikes)
  • Optical characterization (luminescence bench, absorption bench, electroluminescence bench, pump-probe bench in femto-second regime)

Plan of the IETR gray room for LPCVD PECVD and Sputt deposit
Plan of the IETR gray room for LPCVD PECVD and Sputt deposit