►Know-how
The Nano-Rennes platform has a set of equipment enabling thermal operations of various types. These operations aim to achieve:
- Thermal oxidation treatments (wet or dry) of Si
- Doping by diffusion
- Heat treatments (high or low) ohmic contact temperature
►Description of heat treatment equipment
Lambda-Physics recrystallisation excimer laser (IETR-GM)
- l=
- Impulsion =, Pmax =