►Know-how
The Nano-Rennes platform is equipped with a set of equipment dedicated to the deposition of thin, metallic and dielectric layers.
Applications:
- Ohmic contacts (n and p) (generic for InP, Si and GaP)
- Electrical passivation
- Sacrificial or masking layer (RIE)
- Low temperature technology.
►Description of deposit equipment
Metal deposit
3 Joules evaporators (FOTON-INSA, GM-IETR)
Plassys : Al
Edwards : Au et Cr
Leybold : Au, In, AuZn.
Specificities :
- Deposit on one (4) 2 inch plates
- Secondary vacuum (10-5 mbar)
3 electrons gun evaporators (FOTON-INSA, IETR-GM)
Temescal : Au, Ti, Pt, Ge, Ni (10 plates 2 inches , ..)
2 Alliance concept : Al, Cr, Au, Pt, Ti, Ni, W, Ge, Cu, … (< 4 inches, lift-off process)
Specificities :
- 2 inches plates
- Thickness control
- Secondary vacuum (10-7 mbar)
2 RF cathodic sprays (FOTON-INSA and IETR-GM)
Plasmionic : Al, Pt, Cr 
Leybold : Ti, Au, AuGe
Specificities :
- 2 inches plates
- Secondary vacuum (10-7 mbar)
RENA electro-deposition system (IETR-GM)
Material : Cu
Specificities :
- 2 inches plates
- From a few nm to >100 nm
Semiconductors
4 LPCVD reactors ( IETR-GM)
Poly-Si N & P, SiNx, nanowires.
Specificities :
- 2-3 inches
- Secondary vacuum (10-7 mbar)
APCVD (High pression vapor despotion) : TEMPRESS (IETR-GM)
- Elements : SiH4, O2, N2 (T<200 °C)
3 PECVD home made reactors (Si (doped PH3, AsH3), SiO2, SiN low temperature)
PECVD Corial :
- aSi, SiO2, Si3N4 (300°C)
- Interferometric control
ICP PECVD Corial
- aSi , SiO2, Si3N4 (50-200°C), doping PH3, AsH3
- Interferometric control
3 RF cathode sprayers
- Leybold (aSi, aSiN)
- Alcatel (aSi, ZnS, Ge, special alloys)
- Ranex (AlN)
Deposit in liquid form
1 ink jet printer ( IETR-GM)
Ceraprinter X-series:
Materials: conductive inks (Silver, PEDOT-PSS…)
Dielectric inks (polymer)
In-house developed inks…
Specificities :
- Maximum substract size: A4 (21*29.7cm)
- Multi-materials (head of 256 nozzles or 16 nozzles)
Organic deposit
1 multi-crucible heat exchanger in gloves box (IETR-GM)
In-house developed reactor
Specificities :
- 2 inches
- Secondary vacuum (10-7 mbar)
►Examples of achievements
