►Education objectives
    ►Several offers
    ►Example of users
►Education objectives
Nanorennes paltform enables the training of more than 300 people each year, from university students, PhD students and even researchers.
These trainings aim in the introduction of micro-nano fabrication basics for microelectronics and/or nanophotonics. They consist in device fabrications in cleanroom, based on a large variety of processing tools (lithography, sputerring, evaporation) until the device characterization (IV prober, electro-optic characterizations).

Supervision of such trainings may be done by executive staff of the plaform, or also by external supervisors, who are in charge of the students under formation. In this last case, externals have been previously formed, which enable them to include such training within their own university process.

►Les différentes offres de formation
La plateforme propose,un ensemble de formations touchant aux domaines de la microélectronique, la photonique, les microsystèmes et les capteurs.
AboutDuration (days)Photolithography mask levelsTechnologies
 n°1Fabrication and characterizations of multimode quantum wells laser diodes for telecommunication2.51Photolithography (<0), sputerring, cleavage. Electro-optical characterizations.
n°2Fabrication and characterizations of monomode quantum wells laser diodes for telecommunication32Photolithography (>0 and <0), EPCVD, RIE, sputerring, cleavage. Electro-optical characterizations.
n°3Fabrication and characterizations MOS transistors on silicon.2.54Photolithography (>0), oxydation (wet, dry), diffusion doping, wet etching, joules evaporation. Electrical characterizations.
n°4Fabrication and characterizations silicon photodiodes. 22Photolithography (>0), oxydation (wet, dry), diffusion doping, wet etching, joules evaporation. Electrical characterizations.
n°5Fabrication and characterizations of biological sensors based on MEMs technologies.2.5-Photolithography (>0), oxydation (wet, dry), diffusion doping, wet etching, joules evaporation. Electrical characterizations.

Etusiant1 Etudiants Capteur température à membrane Etudiants Etudiants Diode Laser monomode


Training fees include documents, consummables (substrate, equipment, chemicals, cleanroom facilities, ...).

Below are indicated the fees for a single student, as function of the formation and supervision.

TrainingPrix /étudiant sans formateur (€)Prix/étudiant avec formateur (€)

►Example of users ...

Ville d'origineEtablissementFilières
RennesUniversité Rennes 1License et Master 1 EAA
License GEII (license pro mécatronique)
Master 2 prof CMM (composants Microélectroniques et Microsystèmes)
Master 2 prof SEO (systèmes électroniques et optoélectroniques)
INSA RennesIngénieur MNT (Matériaux et Nanotechnologies)
Ingénieur SRC (Systèmes et Réseaux de communication)
Master 2 recherche PHOT-IN (Physique et Photonique)
CaenENSIIngénieur Microélectronique
Ingénieur Matériaux, Micromécanique et Microélectronique
NantesUniversité de NantesMaster 1 EEA
Master 2 prof Conception, mise en oeuvre et qualité des composants électroniques et optoélectroniques
Ecole Polytechnique universitaireIngénieur Sciences des matériaux
AngersESEOIngénieur Microélectronique
LorientUniversité de Bretagne SudMaster 2 recherche MARS (Microtechnologies, architecture, réseaux et systèmes de communications)
BordeauxUniversité de Bordeaux 1License pro Gestion de production
BrestUniversité de Bretagne SudMaster 2 prof Electronique et systèmes communicants